New Equipment
High-End Instrument & Equipment: High Precision & High Reliability
- High-throughput digital lithography
- Nanoimprint lithography & precision coating
- Automated optical design + algorithms
New Process
Lithography System Stability: Enhance Surface Quality
- Lithography stability and consistency database
- Integrated data processing and lithography precision database
New Technologies
Intelligent Flexible Manufacturing: Precision Guarantee & Testing Standard
- AI+ Intelligent Computing: algorithmic efficiency
- Light-field imaging for machining precision
- Controllability of nano-precision printing process
New Devices
Photonic Devices/ Materials: Design & Process Database
- AI-enabled enhancement of digital design for micro-nano structured materials and devices, computational lithography processes, and optical inspection capabilities
- Establishment of standardized SOPs, full-process quantitative inspection, and databases for design, lithography, coating, and imprinting processes